Analyzing Properties of Pizeoelectric Substrates Incoporating Finite Element Method

Author

Wang, Shumiing T. ; Chen, Shen-Whan ; Huang, Jen-Fa ; Lin, Chun-Chieh

Author_Institution

Dept. of Electr. Eng., I-Shou Univ., Kaohsiung, Taiwan

Volume

1

fYear

2010

fDate

13-14 March 2010

Firstpage

578

Lastpage

581

Abstract

Surface acoustic wave (SAW) devices are of great interest for chemical and biochemical sensing applications. As the new piezoelectric materials are produced and the development of SAW device substrates expands from single-layer to multi-layer, analyzing the properties of piezoelectric substrates becomes more and more difficult. In this paper, a method that applies finite element (FEM) simulator to analyze piezoelectric substrates was developed. To verify the feasibility of the proposed method, the coupling-of-modes (COM) parameters of piezoelectric substrate were calculated and then applied to design a SAW device. The simulation result of the device is compared with that obtained by equivalent circuit model.

Keywords

equivalent circuits; finite element analysis; piezoelectric materials; surface acoustic wave devices; analyzing properties; coupling-of-modes parameters; equivalent circuit model; finite element method; multi-layer; pizeoelectric substrates; single-layer; surface acoustic wave devices; Acoustic waves; Analytical models; Chemicals; Circuit simulation; Coupling circuits; Equivalent circuits; Finite element methods; Piezoelectric materials; Surface acoustic wave devices; Surface acoustic waves; coupling-of-modes; dispersionrelation; finite element method (FEM); surface acoustic wavedevices;

fLanguage

English

Publisher

ieee

Conference_Titel

Measuring Technology and Mechatronics Automation (ICMTMA), 2010 International Conference on

Conference_Location

Changsha City

Print_ISBN

978-1-4244-5001-5

Electronic_ISBN

978-1-4244-5739-7

Type

conf

DOI

10.1109/ICMTMA.2010.809

Filename

5458840