Title :
Silicon waveguide coupled resonator infrared detector
Author :
Shafiiha, R. ; Zheng, D. ; Liao, S. ; Dong, P. ; Liang, H. ; Feng, N. ; Luff, B.J. ; Feng, D. ; Li, Guoliang ; Cunningham, John ; Raj, Kannan ; Krishnamoorthy, Ashok V. ; Asghari, M.
Author_Institution :
Kotura Inc., Monterey Park, CA, USA
Abstract :
We present a silicon photodiode implemented in a waveguide coupled ring resonator structure. Infrared detection was achieved by Si+ ion implantation. A 15 ¿m-radius ring-based detector demonstrated an equivalent responsivity to a 3 mm straight waveguide device.
Keywords :
cavity resonators; infrared detectors; ion implantation; silicon; waveguide couplers; equivalent responsivity; infrared detection; ion implantation; silicon waveguide coupled resonator; size 3 mm; waveguide coupled ring resonator structure; waveguide device; Absorption; Doping; Infrared detectors; Integrated optics; Ion implantation; Optical coupling; Optical ring resonators; Optical waveguides; Particle beam optics; Silicon;
Conference_Titel :
Optical Fiber Communication (OFC), collocated National Fiber Optic Engineers Conference, 2010 Conference on (OFC/NFOEC)
Conference_Location :
San Diego, CA
Electronic_ISBN :
978-1-55752-884-1
