Title :
Low loss chalcogenide glass waveguides fabricated by thermal nanoimprint lithography
Author :
Madden, Steve ; Han, Ting ; Bulla, Douglas ; Davies, Barry Luther
Author_Institution :
Centre for Ultrahigh Bandwidth Devices, Australian Nat. Univ., Acton, ACT, Australia
Abstract :
Low loss thermally nanoimprinted chalcogenide waveguides are demonstrated for the first time, uniquely using a soft PDMS stamp. Losses of 0.24 dB/cm at 1550 nm limited by Rayleigh scattering were achieved and embossing of As2S3 also demonstrated.
Keywords :
Rayleigh scattering; arsenic compounds; chalcogenide glasses; embossing; integrated optics; nanolithography; optical fabrication; optical glass; optical losses; optical waveguides; soft lithography; As2S3; Rayleigh scattering; embossing; low loss chalcogenide glass waveguides; soft PDMS stamp; thermal nanoimprint lithography; wavelength 1550 nm; Biomedical optical imaging; Biomembranes; Glass; Integrated optics; Nanolithography; Nonlinear optics; Optical devices; Optical losses; Optical scattering; Optical waveguides;
Conference_Titel :
Optical Fiber Communication (OFC), collocated National Fiber Optic Engineers Conference, 2010 Conference on (OFC/NFOEC)
Conference_Location :
San Diego, CA
Electronic_ISBN :
978-1-55752-884-1
