DocumentCode
516239
Title
Recent Developments in Integrated Sensors
Author
Middelhoek, S.
Author_Institution
Department of Electrical Engineering, Delft University of Technology
fYear
1984
fDate
0-0 Sept. 1984
Firstpage
18
Lastpage
26
Abstract
The application of micro-electronics to non-electronic products is noticeably impeded by the lack of sensors which have a performance/price ratio comparable to that of integrated circuits. The great improvement of integrated circuits was made possible by the new processing techniques. In the first part of this paper the suitability of silicon for also making sensors will be discussed. In the second part some novel concepts, which become feasible when silicon is employed, will be described.
Keywords
Chemical sensors; Chemical technology; Force measurement; II-VI semiconductor materials; Magnetic sensors; Optical materials; Signal processing; Silicon; Temperature sensors; Transducers;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Circuits Conference, 1984. ESSCIRC '84. Tenth European
Conference_Location
Edinburgh, UK
Type
conf
Filename
5467832
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