Title :
CMOS Magnetic-Field Sensor System
Author :
Sprotte, Andreas ; Buckhorst, Rolf ; Brockherde, Werner ; Hosticka, Bedrich J. ; Bosch, Dieter
Author_Institution :
Fraunhofer Institute of Microelectronic Circuits and Systems, Duisburg, Germany
Abstract :
A magnetic-field sensor system integrated in CMOS technology with additional processing steps necessary for sensor fabrication is presented. The system contains a permalloy magnetoresistive microbridge acting as sensor, temperature compensation circuitry, readout electronics, reference voltage bias, and clock generation.
Keywords :
CMOS process; CMOS technology; Fabrication; Integrated circuit technology; Magnetic circuits; Magnetic sensors; Magnetoresistance; Readout electronics; Sensor systems; Temperature sensors;
Conference_Titel :
Solid-State Circuits Conference, 1993. ESSCIRC '93. Nineteenth European
Conference_Location :
Sevilla, Spain
Print_ISBN :
2-86335-134-X
