DocumentCode
516275
Title
CMOS Magnetic-Field Sensor System
Author
Sprotte, Andreas ; Buckhorst, Rolf ; Brockherde, Werner ; Hosticka, Bedrich J. ; Bosch, Dieter
Author_Institution
Fraunhofer Institute of Microelectronic Circuits and Systems, Duisburg, Germany
Volume
1
fYear
1993
fDate
22-24 Sept. 1993
Firstpage
254
Lastpage
257
Abstract
A magnetic-field sensor system integrated in CMOS technology with additional processing steps necessary for sensor fabrication is presented. The system contains a permalloy magnetoresistive microbridge acting as sensor, temperature compensation circuitry, readout electronics, reference voltage bias, and clock generation.
Keywords
CMOS process; CMOS technology; Fabrication; Integrated circuit technology; Magnetic circuits; Magnetic sensors; Magnetoresistance; Readout electronics; Sensor systems; Temperature sensors;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid-State Circuits Conference, 1993. ESSCIRC '93. Nineteenth European
Conference_Location
Sevilla, Spain
Print_ISBN
2-86335-134-X
Type
conf
Filename
5467879
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