Title :
Electron Beam Observability and Controlability for the Debugging of Integrated Circuits
Author :
Guiguet, I. ; Micollet, D. ; Laurent, J. ; Courtois, B.
Author_Institution :
COMPUTER ARCHITECTURE GROUP, IMAG/TIM3, 46 Avenue Félix VIALLET, 38031 GRENOBLE Cedex FRANCE
Abstract :
Observability and controlability using an electron beam are addressed in this paper. For observability, a link between a CALMA description and a Scanning Electron Microscope (SEM), based on a superimposition technique, is detailled. For controlability, a study of the Electron Beam Induced Current (EBIC) phenomenon in a diffused diode is presented.
Keywords :
Adaptive arrays; Automatic testing; Automatic voltage control; Circuit testing; Debugging; Electron beams; Electron emission; Logic arrays; Observability; Scanning electron microscopy;
Conference_Titel :
Solid-State Circuits Conference, 1986. ESSCIRC '86. Twelfth European
Conference_Location :
Delft, The Netherlands
