Title :
Status and Trends of SOI
Author :
Flandre, Denis ; Colinge, Jean-Pierre
Author_Institution :
Laboratoire de Microélectronique, Université catholique de Louvain, Place du Levant 3, B-1348 Louvain-la-Neuve, Belgium
Abstract :
The evolution of the SOI material, devices and circuit applications is reviewed over the last ten years and demontrates that SOI has now reached a level of maturity which renders it suitable for a number of applications. Low-power, high-temperature, high-performance analog and microwave capabilities of SOI are discussed into further detail.
Keywords :
Aerospace materials; Circuits; Electromagnetic heating; Fabrication; Microwave devices; Optical materials; Semiconductor films; Silicon compounds; Silicon on insulator technology; Substrates;
Conference_Titel :
Solid-State Circuits Conference, 1994. ESSCIRC '94. Twentieth European
Conference_Location :
Ulm, Germany
Print_ISBN :
2-86332-160-9
