Title :
A Low Noise, High Resolution Silicon Temperature Sensor
Author :
Szajda, Kenneth S. ; Sodini, Charles G. ; Bowman, H.Frederick
Author_Institution :
Department of Electrical Engineering and Computer Science, Massachusetts Institute of Technology, Cambridge, MA 02139
Abstract :
High resolution temperature measurement is essential for determination of blood perfusion in biomaterials. A compact, low noise, high resolution temperature sensor designed for use in an invasive tissue property measurement probe is presented. The technique uses feedback to improve linearity and reduce noise. Data from test chips shows temperature resolution of 6.8 m°C. The chips were fabricated using a 1.75 um double poly, single metal modified CMOS process designed for this project.
Keywords :
Blood; Feedback; Linearity; Noise measurement; Noise reduction; Probes; Semiconductor device measurement; Silicon; Temperature measurement; Temperature sensors;
Conference_Titel :
Solid-State Circuits Conference, 1994. ESSCIRC '94. Twentieth European
Conference_Location :
Ulm, Germany
Print_ISBN :
2-86332-160-9
