DocumentCode :
516926
Title :
Research and Development of IC Technology in Japan
Author :
Sugano, T.
Author_Institution :
University of Tokyo, Japan
fYear :
1979
fDate :
18-21 Sept. 1979
Firstpage :
139
Lastpage :
143
Keywords :
Computer industry; Impurities; Magnetic field measurement; Oxidation; Photoluminescence; Research and development; Silicon; Stacking; Very large scale integration; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Solid State Circuits Conference - ESSCIRC 79, Fifth European
Conference_Location :
Southampton, UK
Print_ISBN :
0-85296-208-8
Type :
conf
Filename :
5468940
Link To Document :
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