Title :
Research and Development of IC Technology in Japan
Author_Institution :
University of Tokyo, Japan
Keywords :
Computer industry; Impurities; Magnetic field measurement; Oxidation; Photoluminescence; Research and development; Silicon; Stacking; Very large scale integration; Voltage;
Conference_Titel :
Solid State Circuits Conference - ESSCIRC 79, Fifth European
Conference_Location :
Southampton, UK
Print_ISBN :
0-85296-208-8