Title :
I2L, On-Chip Compatible with High Voltage Analog Functions, Obtained by Selective Epi-Doping
Author_Institution :
Central Inst. for Ind. Res., Oslo, Norway
Abstract :
We discuss different ways of obtaining a simple I2L/high voltage analog process. Results are given for a standard analog process, modified by a phosphorous implant in the I2L section to increase the epi-doping. The data are compared to model calculations.
Keywords :
analogue integrated circuits; semiconductor doping; high voltage analog functions; phosphorous implant; selective EPI-doping; simple I2L/high voltage analog process; standard analog process; Analog integrated circuits; Delay; Doping; Implants; Logic circuits; Semiconductor process modeling; Voltage;
Conference_Titel :
Solid State Circuits Conference - Digest of Technical Papers, 1978. ESSCIRC 78. 4th European
Conference_Location :
Amsterdam