Title :
Microsystems: A Challenge for IC Designers
Author :
Degrauwe, M. ; Chevroulet, M. ; Bergqvist, J. ; Bardyn, J.-P.
Author_Institution :
CSEM Centre Suisse d´´Electronique et de Microtechnique SA, Jaquet-Droz 1, CH-2007 Neuchâtel, Switzerland
Abstract :
Micromachined mechanics, magnetics and optics allow in conjunction with microelectronics the development of various microsystems. Scaling, co-integration and introduction of arrays of sensors and actuators render the task of the designer difficult. Innovations are required at the building block and system level.
Keywords :
Actuators; Electronics packaging; Force sensors; Integrated circuit interconnections; Magnetic sensors; Microelectronics; Micromachining; Optical sensors; Sensor arrays; Temperature sensors;
Conference_Titel :
Solid-State Circuits Conference, 1995. ESSCIRC '95. Twenty-first European
Conference_Location :
Lille, France
Print_ISBN :
2-86332-180-3
