Title :
MESFET Subnanosecond Integrated Gate for LSI Circuits
Author :
Arnodo, C. ; Nuzillat, G. ; Puron, J P
Keywords :
Doping profiles; Electron beams; Energy consumption; Geometry; Integrated circuit technology; Ion implantation; Large scale integration; MESFET integrated circuits; Silicon; Threshold voltage;
Conference_Titel :
Solid State Circuits Conference (ESSCIRC), 1975 First European
Conference_Location :
Canterbury, UK
Print_ISBN :
0-85296-149-9