Title :
Surface micromachined crescent micropump
Author :
Haik, Yousef ; Hendrix, Jason ; Galambos, Paul ; Kilani, Mohammad
Author_Institution :
Center for Res. Excellence in Nanobiosciences, Univ. of North Carolina at Greensboro, Greensboro, NC, USA
Abstract :
This study presents the design, fabrication, analysis and testing of a novel crescent micropump fabricated using surface micromachining technology. The pump utilizes a ring gear driven through teeth on its outer surface to drive the pumping mechanism through teeth on its inner surface. An analytical solution for the volumetric flow rate for the micropump agrees with the obtained experimental results.
Keywords :
flow; gears; micromachining; micropumps; ring gear; surface micromachined crescent micropump; surface micromachining technology; volumetric flow rate; Biomembranes; Chemical analysis; Fabrication; Gears; Mechanical engineering; Microfluidics; Micropumps; Pumps; Teeth; Temperature;
Conference_Titel :
Mechatronics and its Applications (ISMA), 2010 7th International Symposium on
Conference_Location :
Sharjah
Print_ISBN :
978-1-4244-6665-8
