• DocumentCode
    517541
  • Title

    Surface micromachined crescent micropump

  • Author

    Haik, Yousef ; Hendrix, Jason ; Galambos, Paul ; Kilani, Mohammad

  • Author_Institution
    Center for Res. Excellence in Nanobiosciences, Univ. of North Carolina at Greensboro, Greensboro, NC, USA
  • fYear
    2010
  • fDate
    20-22 April 2010
  • Firstpage
    1
  • Lastpage
    16
  • Abstract
    This study presents the design, fabrication, analysis and testing of a novel crescent micropump fabricated using surface micromachining technology. The pump utilizes a ring gear driven through teeth on its outer surface to drive the pumping mechanism through teeth on its inner surface. An analytical solution for the volumetric flow rate for the micropump agrees with the obtained experimental results.
  • Keywords
    flow; gears; micromachining; micropumps; ring gear; surface micromachined crescent micropump; surface micromachining technology; volumetric flow rate; Biomembranes; Chemical analysis; Fabrication; Gears; Mechanical engineering; Microfluidics; Micropumps; Pumps; Teeth; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Mechatronics and its Applications (ISMA), 2010 7th International Symposium on
  • Conference_Location
    Sharjah
  • Print_ISBN
    978-1-4244-6665-8
  • Type

    conf

  • Filename
    5478431
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=517541