Title :
Energy dissipation associated with material damping on vibrating MEMS components
Author :
De Pasquale, Giorgio ; Veijola, Timo ; Somà, Aurelio
Author_Institution :
Dept. of Mech., Politec. di Torino, Turin, Italy
Abstract :
The energy dissipation associated with vibrating MEMS structures is studied in this paper with measurements and modeling. A climatic chamber previously designed and built was used to perform measurements at low static pressures; the tests allowed estimating the contributions of air damping and material damping affecting the system. The measured quality factors are compared with the modeled ones. Approximations of rarefied gas flow in the perforated oscillating structure were used in the modeling.
Keywords :
Q-factor; damping; micromechanical devices; air damping; climatic chamber; energy dissipation; material damping; quality factors; vibrating MEMS components; vibrating MEMS structures; Damping; Energy dissipation; Energy measurement; Fluid flow; Materials testing; Micromechanical devices; Performance evaluation; Q factor; System testing; Vibration measurement;
Conference_Titel :
Design Test Integration and Packaging of MEMS/MOEMS (DTIP), 2010 Symposium on
Conference_Location :
Seville
Print_ISBN :
978-1-4244-6636-8
Electronic_ISBN :
978-2-35500-011-9
