Simulation of a MEMS piezoelectric energy harvester

Author

Ralib, Aliza Aini Md ; Nordin, Anis Nurashikin ; Salleh, Hanim

Author_Institution

Dept. of Electr. & Comput. Eng., Int. Islamic Univ. Malaysia, Kuala Lumpur, Malaysia

fYear

2010

fDate

5-7 May 2010

Firstpage

177

Lastpage

181

Abstract

The growing demand of portable electronic devices has created the demand of long lasting recharged source of power. Non-environmental friendly conventional batteries with limited lifetimes are no longer a feasible option. This paper proposes a piezoelectric, vibration based energy harvester. The design and simulation of a MEMS piezoelectric cantilever beam with interdigitated electrodes is described. The micro-energy harvester is formed using a silicon substrate, ZnO piezoelectric layer, Pt electrodes and nickel proof mass. Finite element simulation was conducted using CoventorWare^© to obtain the device at resonance frequency, output voltage and optimum dimensions.

Keywords

III-V semiconductors; beams (structures); energy harvesting; micromechanical devices; piezoelectric devices; zinc compounds; MEMS piezoelectric energy harvester; ZnO; interdigitated electrodes; piezoelectric cantilever beam; portable electronic devices; Batteries; Electrodes; Finite element methods; Micromechanical devices; Nickel; Resonance; Resonant frequency; Silicon; Structural beams; Zinc oxide; cantilever beam; energy harvesting; interdigitated electrodes; piezoelectric;

fLanguage

English

Publisher

ieee

Conference_Titel

Design Test Integration and Packaging of MEMS/MOEMS (DTIP), 2010 Symposium on

Conference_Location

Seville

Print_ISBN

978-1-4244-6636-8

Electronic_ISBN

978-2-35500-011-9

Type

conf

Filename

5486470