Title :
Simulation of a MEMS piezoelectric energy harvester
Author :
Ralib, Aliza Aini Md ; Nordin, Anis Nurashikin ; Salleh, Hanim
Author_Institution :
Dept. of Electr. & Comput. Eng., Int. Islamic Univ. Malaysia, Kuala Lumpur, Malaysia
Abstract :
The growing demand of portable electronic devices has created the demand of long lasting recharged source of power. Non-environmental friendly conventional batteries with limited lifetimes are no longer a feasible option. This paper proposes a piezoelectric, vibration based energy harvester. The design and simulation of a MEMS piezoelectric cantilever beam with interdigitated electrodes is described. The micro-energy harvester is formed using a silicon substrate, ZnO piezoelectric layer, Pt electrodes and nickel proof mass. Finite element simulation was conducted using CoventorWare© to obtain the device at resonance frequency, output voltage and optimum dimensions.
Keywords :
III-V semiconductors; beams (structures); energy harvesting; micromechanical devices; piezoelectric devices; zinc compounds; MEMS piezoelectric energy harvester; ZnO; interdigitated electrodes; piezoelectric cantilever beam; portable electronic devices; Batteries; Electrodes; Finite element methods; Micromechanical devices; Nickel; Resonance; Resonant frequency; Silicon; Structural beams; Zinc oxide; cantilever beam; energy harvesting; interdigitated electrodes; piezoelectric;
Conference_Titel :
Design Test Integration and Packaging of MEMS/MOEMS (DTIP), 2010 Symposium on
Conference_Location :
Seville
Print_ISBN :
978-1-4244-6636-8
Electronic_ISBN :
978-2-35500-011-9
