DocumentCode :
518557
Title :
High-sensitive piezoelectrically-transduced silicon disk micro resonator for on-chip human healthcare
Author :
Lu, Jian ; Suga, Tadatomo ; Zhang, Yi ; Itoh, Toshihiro ; Maeda, Ryutaro ; Mihara, Takashi
Author_Institution :
Sch. of Eng., Univ. of Tokyo, Tokyo, Japan
fYear :
2010
fDate :
5-7 May 2010
Firstpage :
114
Lastpage :
118
Abstract :
In-home healthcare and smart nursing are highly promoted recently by progress and advances in micro electromechanical systems (MEMS) and wireless sensor network (WSN) technology. In this work, a piezoelectric lead zirconate titanate (PZT) thin film actuated and sensed single crystal silicon disk resonator with excellent system integration capability, low driving voltage and great mechanical quality factor (Q-factor) was successfully developed for trace amount of chemicals detection as well as for recognition of gas molecular from human breath. The Q-factor dependence on geometries of the disk and the PZT pattern was investigated and discussed both in air and under reduced pressure. The equivalent capacitance and resistance of the PZT film at resonant frequency were measured. Applications in on-chip human healthcare are expected after system integration with CMOS and other MEMS components.
Keywords :
Q-factor; bioMEMS; health care; lead compounds; micromechanical resonators; piezoelectric thin films; silicon; wireless sensor networks; MEMS; PZT; Q-factor; Si; WSN; equivalent capacitance; equivalent resistance; human breath; in-home healthcare; lead zirconate titanate thin film; micro electromechanical systems; on-chip human healthcare; piezoelectricity; quality factor; silicon disk micro resonator; smart nursing; wireless sensor network; Chemical technology; Electromechanical systems; Humans; Medical services; Micromechanical devices; Piezoelectric films; Q factor; Silicon; Titanium compounds; Wireless sensor networks;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Design Test Integration and Packaging of MEMS/MOEMS (DTIP), 2010 Symposium on
Conference_Location :
Seville
Print_ISBN :
978-1-4244-6636-8
Electronic_ISBN :
978-2-35500-011-9
Type :
conf
Filename :
5486482
Link To Document :
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