DocumentCode
518560
Title
Design of a Smart CMOS High-Voltage driver for electrostatic MEMS switches
Author
Dumas, Norbert ; Latorre, Laurent ; Mailly, Frederick ; Nouet, Pascal
Author_Institution
LIRMM, Univ. Montpellier II, Montpellier, France
fYear
2010
fDate
5-7 May 2010
Firstpage
44
Lastpage
47
Abstract
This paper addresses the design of CMOS High-Voltage drivers for the actuation of MEMS relays with pull-in voltage in the 20-50V range. So-called “Smart Drivers” have been developed using a standard High-Voltage CMOS technology. These drivers provide the required high voltage for the MEMS actuation and integrate a diagnosis ability to determine whether the pull-in occurs during the actuation process or not.
Keywords
CMOS integrated circuits; driver circuits; electrostatic devices; microswitches; MEMS actuation; MEMS relays; diagnosis ability; electrostatic MEMS switches; smart CMOS high-voltage driver; CMOS technology; Capacitance; Dielectrics; Electrodes; Electrostatic actuators; Micromechanical devices; Microswitches; Radio frequency; Switches; Voltage; CMOS; Diagnosis; Electrostatic Switch; MEMS;
fLanguage
English
Publisher
ieee
Conference_Titel
Design Test Integration and Packaging of MEMS/MOEMS (DTIP), 2010 Symposium on
Conference_Location
Seville
Print_ISBN
978-1-4244-6636-8
Electronic_ISBN
978-2-35500-011-9
Type
conf
Filename
5486486
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