Title :
Identification of dynamic nonlinear thermal transfers for precise correction of bias induced by temperature variations
Author :
Casenave, Celine ; Montseny, Gerard ; Camon, Henri ; Blard, Francois
Author_Institution :
LAAS, CNRS, Toulouse, France
Abstract :
We present a least squares method for dynamic correction of biases induced by temperature variations when very high precision is required. This method is based on a simple dynamic model allowing to take into account the macroscopic effects of complex underlying thermal phenomena inside the device.
Keywords :
least mean squares methods; micromechanical devices; temperature; dynamic nonlinear thermal transfer; least squares method; macroscopic effect; temperature variation; Additive noise; Concrete; Indium phosphide; Least squares methods; Metrology; Micromechanical devices; Temperature measurement; Temperature sensors; Time measurement; Uninterruptible power systems;
Conference_Titel :
Design Test Integration and Packaging of MEMS/MOEMS (DTIP), 2010 Symposium on
Conference_Location :
Seville
Print_ISBN :
978-1-4244-6636-8
Electronic_ISBN :
978-2-35500-011-9
