Title :
Simple and efficient control of MEMS by means of operatorial transformations
Author :
Montseny, Emmanuel ; Camon, Henri
Author_Institution :
LAAS, CNRS, Toulouse, France
Abstract :
We present simple and original techniques well suited for designing efficient control strategies of any type, for a generic class of MEMS. These techniques are particularly well adapted when high performances and precision are required, because they are intensively based on the predictive capabilities of the model without needing its resolution, which make the so-obtained controls both simple to implement and robust.
Keywords :
micromechanical devices; predictive control; MEMS; control strategy; efficient control; operatorial transformations; predictive capability; simple control; Control systems; Cost function; Indium phosphide; Micromechanical devices; Nonlinear dynamical systems; Open loop systems; Predictive models; Robust control; Signal resolution; Uninterruptible power systems;
Conference_Titel :
Design Test Integration and Packaging of MEMS/MOEMS (DTIP), 2010 Symposium on
Conference_Location :
Seville
Print_ISBN :
978-1-4244-6636-8
Electronic_ISBN :
978-2-35500-011-9