DocumentCode
518573
Title
Simple and efficient control of MEMS by means of operatorial transformations
Author
Montseny, Emmanuel ; Camon, Henri
Author_Institution
LAAS, CNRS, Toulouse, France
fYear
2010
fDate
5-7 May 2010
Firstpage
148
Lastpage
153
Abstract
We present simple and original techniques well suited for designing efficient control strategies of any type, for a generic class of MEMS. These techniques are particularly well adapted when high performances and precision are required, because they are intensively based on the predictive capabilities of the model without needing its resolution, which make the so-obtained controls both simple to implement and robust.
Keywords
micromechanical devices; predictive control; MEMS; control strategy; efficient control; operatorial transformations; predictive capability; simple control; Control systems; Cost function; Indium phosphide; Micromechanical devices; Nonlinear dynamical systems; Open loop systems; Predictive models; Robust control; Signal resolution; Uninterruptible power systems;
fLanguage
English
Publisher
ieee
Conference_Titel
Design Test Integration and Packaging of MEMS/MOEMS (DTIP), 2010 Symposium on
Conference_Location
Seville
Print_ISBN
978-1-4244-6636-8
Electronic_ISBN
978-2-35500-011-9
Type
conf
Filename
5486503
Link To Document