DocumentCode
518575
Title
Hermetic BSG thin film coatings for harsh environment applications
Author
Maus, S. ; Hansen, U. ; Leib, J. ; Toepper, M.
Author_Institution
MSG Lithoglas AG, Berlin, Germany
fYear
2010
fDate
5-7 May 2010
Firstpage
242
Lastpage
246
Abstract
The use of a plasma-assisted e-beam evaporation process enables a cost-efficient exploitation of the outstanding material properties of borosilicate glass - a chemically very inert material with minimal moisture absorption, excellent optical properties and excellent time and temperature stability. This paper gives further insight on the deposition and structuring of borosilicate glass films and the achievable film properties as well as feasible applications.
Keywords
borosilicate glasses; coating techniques; evaporation; thin films; borosilicate glass films; harsh environment application; hermetic BSG thin film coatings; inert material; material properties; moisture absorption; optical properties; plasma-assisted e-beam evaporation process; temperature stability; Coatings; Glass; Optical films; Plasma applications; Plasma chemistry; Plasma materials processing; Plasma properties; Plasma stability; Plasma temperature; Transistors;
fLanguage
English
Publisher
ieee
Conference_Titel
Design Test Integration and Packaging of MEMS/MOEMS (DTIP), 2010 Symposium on
Conference_Location
Seville
Print_ISBN
978-1-4244-6636-8
Electronic_ISBN
978-2-35500-011-9
Type
conf
Filename
5486506
Link To Document