DocumentCode
518579
Title
Technology of microthermoforming of complex three-dimensional parts with multiscale features
Author
Heilig, Markus ; Schneider, Marc ; Ide, Tim ; Worgull, Matthias
Author_Institution
Inst. for Microstructure Technol., Karlsruhe Inst. of Technol., Eggenstein-Leopoldshafen, Germany
fYear
2010
fDate
5-7 May 2010
Firstpage
289
Lastpage
294
Abstract
This paper will present results of an improved process based on a new replication machine. Temperature stability and pressure distribution is highly improved, even at reduced cycle times. With an upgraded temperature range microthermoforming of high temperature polymers is possible. This technology is well suited for the replication of three-dimensional micro parts with multiscale features.
Keywords
microfabrication; polymers; temperature distribution; thermoforming; high-temperature polymers; microparts; microthermoforming; multiscale features; pressure distribution; temperature stability; Components, packaging, and manufacturing technology; Embossing; Microstructure; Nanostructures; Polymer films; Shape; Stability; Surface structures; Temperature distribution; Thermoforming;
fLanguage
English
Publisher
ieee
Conference_Titel
Design Test Integration and Packaging of MEMS/MOEMS (DTIP), 2010 Symposium on
Conference_Location
Seville
Print_ISBN
978-1-4244-6636-8
Electronic_ISBN
978-2-35500-011-9
Type
conf
Filename
5486511
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