Title :
Technology of microthermoforming of complex three-dimensional parts with multiscale features
Author :
Heilig, Markus ; Schneider, Marc ; Ide, Tim ; Worgull, Matthias
Author_Institution :
Inst. for Microstructure Technol., Karlsruhe Inst. of Technol., Eggenstein-Leopoldshafen, Germany
Abstract :
This paper will present results of an improved process based on a new replication machine. Temperature stability and pressure distribution is highly improved, even at reduced cycle times. With an upgraded temperature range microthermoforming of high temperature polymers is possible. This technology is well suited for the replication of three-dimensional micro parts with multiscale features.
Keywords :
microfabrication; polymers; temperature distribution; thermoforming; high-temperature polymers; microparts; microthermoforming; multiscale features; pressure distribution; temperature stability; Components, packaging, and manufacturing technology; Embossing; Microstructure; Nanostructures; Polymer films; Shape; Stability; Surface structures; Temperature distribution; Thermoforming;
Conference_Titel :
Design Test Integration and Packaging of MEMS/MOEMS (DTIP), 2010 Symposium on
Conference_Location :
Seville
Print_ISBN :
978-1-4244-6636-8
Electronic_ISBN :
978-2-35500-011-9
