Title :
Development an ontology of Microelectromechanical Systems (MEMS) and nano-electromechanical systems (NEMS)
Author :
Romanyuk, Andriy
Author_Institution :
CAD/CAM Dept., Lviv Polytech. Nat. Univ., Lviv, Ukraine
Abstract :
In this paper the process of development a OntoMEMS ontology of Microelectromechanical Systems (MEMS) and Nano-electromechanical Systems (NEMS) are present.
Keywords :
electronic engineering computing; micromechanical devices; nanoelectromechanical devices; ontologies (artificial intelligence); MEMS; NEMS; OntoMEMS ontology; microelectromechanical systems; nanoelectromechanical systems; Artificial intelligence; Conferences; Data mining; Merging; Microelectromechanical systems; Micromechanical devices; Nanoelectromechanical systems; Ontologies; Software tools; Vocabulary; MEMS; NEMS; domain ontology; ontology; upper level ontology;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design (MEMSTECH), 2010 Proceedings of VIth International Conference on
Conference_Location :
Lviv
Print_ISBN :
978-1-4244-7325-0
Electronic_ISBN :
978-966-2191-11-0
