Title :
Modeling of capacitive accelerometer constructions
Author :
Teslyuk, Vasyl ; Karkulovskyi, Bohdan ; Kernytskyy, Andriy
Author_Institution :
CAD Dept., Lviv Polytech. Nat. Univ., Lviv, Ukraine
Abstract :
Modeling of capacitive accelerometers with different types of fastening are described.
Keywords :
accelerometers; capacitive sensors; capacitive accelerometer; electronic devices; micro machining; Acceleration; Accelerometers; Capacitance; Capacitive sensors; Capacitors; Electrodes; Electrostatics; Joining processes; Machining; Solids; ANSYS; Capacitive accelerometer; MEMC; sensor;
Conference_Titel :
Perspective Technologies and Methods in MEMS Design (MEMSTECH), 2010 Proceedings of VIth International Conference on
Conference_Location :
Lviv
Print_ISBN :
978-1-4244-7325-0
Electronic_ISBN :
978-966-2191-11-0
