Title :
Optical coherence tomography for non-destructive investigation of silicon integrated-circuits
Author :
Serrels, K.A. ; Renner, M.K. ; Reid, D.T.
Author_Institution :
Ultrafast Opt. Group, Heriot-Watt Univ., Edinburgh, UK
Abstract :
We present the development of an ultra-high-resolution high-dynamic-range infrared optical coherence tomography imaging system for the novel purpose of sub-surface inspection of silicon integrated-circuits. Examples of substrate thickness profiling and device feature inspection are demonstrated.
Keywords :
nondestructive testing; optical images; optical tomography; supercontinuum generation; device feature inspection; nondestructive investigation; optical coherence tomography; silicon integrated circuits; substrate thickness profiling; Biomedical optical imaging; Inspection; Integrated optics; Nonlinear optics; Optical fiber polarization; Optical imaging; Optical interferometry; Silicon; Tomography; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-890-2
Electronic_ISBN :
978-1-55752-890-2
