DocumentCode
520039
Title
Optical coatings for MEMS devices
Author
Helmbrecht, Michael A.
Author_Institution
Iris AO, Inc., Berkeley, CA, USA
fYear
2010
fDate
16-21 May 2010
Firstpage
1
Lastpage
2
Abstract
Microelectromechanical systems (MEMS) devices pose unique constraints for optical coatings. This paper discusses issues unique to coating MEMS devices and describes design changes necessary to coat a deformable mirror with 99.9% reflective dielectric coatings at 532 nm.
Keywords
antireflection coatings; micromechanical devices; optical films; MEMS devices; deformable mirror; microelectromechanical systems devices; optical coatings; reflective dielectric coatings; wavelength 532 nm; Coatings; Dielectric substrates; Microelectromechanical devices; Micromechanical devices; Mirrors; Optical devices; Optical films; Packaging; Stress; Testing;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location
San Jose, CA
Print_ISBN
978-1-55752-890-2
Electronic_ISBN
978-1-55752-890-2
Type
conf
Filename
5499598
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