Title :
Fabrication of high Q microdisk resonators using thermal nanoimprint lithography
Author :
Schiavone, P. ; Chaix, N. ; Li, Q. ; Eftekhar, A. ; Yegnanarayanan, S. ; Adibi, A.
Author_Institution :
CNRS, Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
We demonstrate the fabrication of high Q microdisk resonators on an SOI platform using thermal nanoimprint lithography. The achieved Q factor is 60000 for 2 μm radius disks. Arrays of 32 resonators show uniform spectral response.
Keywords :
micromechanical resonators; nanolithography; high Q microdisk resonators; thermal nanoimprint lithography; Etching; Integrated optics; Nanolithography; Optical arrays; Optical device fabrication; Optical resonators; Q factor; Resists; Silicon; Thermal engineering;
Conference_Titel :
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-890-2
Electronic_ISBN :
978-1-55752-890-2
