Title :
Laser assisted microstructuring of amorphous silicon for microelectronics
Author :
Halim, M.M. ; Abdolvand, A. ; Fan, Y. ; Persheyev, S.K. ; Main, C. ; Rafailov, E.U. ; Rose, M.J.
Author_Institution :
Sch. of Eng., Phys. & Math., Univ. of Dundee, Dundee, UK
Abstract :
We present experimental and theoretical work on excimer laser microstructuring of hydrogenated amorphous silicon (a-Si:H) films on molybdenum coated glass substrates, in the form of sharp and conical poly-Si spikes, for electron field emission applications.
Keywords :
electron field emission; elemental semiconductors; excimer lasers; laser materials processing; silicon; Si; electron field emission applications; excimer laser microstructuring; hydrogenated amorphous silicon films; laser assisted microstructuring; microelectronics; Amorphous silicon; Electron emission; Glass; Laser ablation; Laser beams; Laser theory; Microelectronics; Optical device fabrication; Optical films; Substrates;
Conference_Titel :
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-890-2
Electronic_ISBN :
978-1-55752-890-2
