Title :
Towards fast femtosecond laser micromachining of glass, effect of deposited energy
Author :
Rajesh, Sheeba ; Bellouard, Yves
Author_Institution :
Mech. Eng. Dept., Eindhoven Univ. of Technol., Eindhoven, Netherlands
Abstract :
We report on the effect of deposited energy for micro-machining of fused silica using femtosecond laser irradiation followed by chemical etching.
Keywords :
etching; high-speed optical techniques; laser beam machining; optical glass; chemical etching; deposited energy; femtosecond laser micromachining; fused silica; Chemical lasers; Etching; Glass; Micromachining; Nonlinear optics; Optical materials; Optical microscopy; Optical pulses; Pulsed laser deposition; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-890-2
Electronic_ISBN :
978-1-55752-890-2
