Large area multi-material plasmonic nanostructures fabricated by replica molding and mechanical sectioning

We demonstrate the fabrication of plasmonic nanostructures (rings, split rings, and other structures) by a process involving molding by soft lithography, thin film deposition, and mechanical sectioning (nanoskiving). This unique process is highly parallelizable and allows for the fabrication of nanostructures of multiple materials in the same plane and very high aspect ratio structures. We characterize the optical properties of concentric gold rings fabricated by this process in the near- to mid-infrared by FDTD simulations and FTIR spectroscopy.