Title :
Optofluidic in-situ fabrication of magnetic actuators in microfluidic channels
Author :
Chung, Su Eun ; Kim, Jiyun ; Min, Seungki ; Kim, Nari Lily ; Kwon, Sunghoon
Author_Institution :
Sch. of Electr. Eng., Seoul Nat. Univ., Seoul, South Korea
Abstract :
We demonstrate in-situ fabrication of magnetic actuators using optofluidic maskless lithography (OFML). Photopatterning of magnetic structures in same place with actuation area reduces extra steps for transportation from the fabrication site to actuation site.
Keywords :
Actuators; Fabrication; Lithography; Magnetic fields; Magnetic materials; Microfluidics; Micromachining; Microstructure; Nanoparticles; Rails;
Conference_Titel :
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location :
San Jose, CA, USA
Print_ISBN :
978-1-55752-890-2
Electronic_ISBN :
978-1-55752-890-2
