Title :
Spatially chirped pulses for high aspect ratio micromachining by femtosecond laser ablation
Author :
Vitek, Dawn ; Adams, Daniel ; Johnson, Adrea ; Kleinfeld, David ; Backus, Sterling ; Durfee, Charles ; Squier, Jeff
Author_Institution :
Dept. of Phys., Colorado Sch. of Mines, Golden, CO, USA
Abstract :
We demonstrate that spatially chirped femtosecond laser pulses overcome previous limitations for the machining of high-aspect ratio features with low numerical aperture beams in optically transparent materials.
Keywords :
chirp modulation; high-speed optical techniques; laser ablation; laser beam machining; micromachining; femtosecond laser ablation; high aspect ratio micromachining; numerical aperture beams; optically transparent materials; spatially chirped pulses; Apertures; Chirp; Laser ablation; Laser beams; Machining; Micromachining; Optical beams; Optical materials; Optical pulses; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-890-2
Electronic_ISBN :
978-1-55752-890-2
