Title :
Woodpile photonic crystal nanocavity in GaAs
Author :
Tang, Lingling ; Yoshie, Tomoyuki
Author_Institution :
Dept. of Electr. & Comput. Eng., Duke Univ., Durham, NC, USA
Abstract :
High-precision three-dimensional woodpile photonic crystal nanocavities with 40 × 55 × 2.25 unit cells are fabricated in GaAs wafer for 1.55 µm wavelength with the two-directional etching method in a simple two-patterning process.
Keywords :
Etching; Fabrication; Gallium arsenide; Microcavities; Nonlinear optical devices; Nonlinear optics; Optical resonators; Photonic band gap; Photonic crystals; Q factor;
Conference_Titel :
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location :
San Jose, CA, USA
Print_ISBN :
978-1-55752-890-2
Electronic_ISBN :
978-1-55752-890-2
