• DocumentCode
    520380
  • Title

    Femtosecond Bessel filaments for high aspect-ratio and taper-free micromachining of dielectrics

  • Author

    Courvoisier, F. ; Bhuyan, M.K. ; Jacquot, M. ; Lacourt, P.A. ; Furfaro, L. ; Withford, M.J. ; Dudley, J.M.

  • Author_Institution
    Dept. of Opt. P.M. Duffieux, Univ. de Franche-Comte, Besançon, France
  • fYear
    2010
  • fDate
    16-21 May 2010
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Femtosecond Bessel beams are demonstrated for high aspect ratio machining in the filamentation regime with water assistance. Taper-free microchannels and micro-trenches are demonstrated with aspect ratio up to 40 and diameters down to 2 µm.
  • Keywords
    Dielectrics; Focusing; Glass; Laser beams; Machining; Materials processing; Microchannel; Micromachining; Nonlinear optics; Ultrafast optics;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
  • Conference_Location
    San Jose, CA, USA
  • Print_ISBN
    978-1-55752-890-2
  • Electronic_ISBN
    978-1-55752-890-2
  • Type

    conf

  • Filename
    5499951
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=520380