Title :
Femtosecond Bessel filaments for high aspect-ratio and taper-free micromachining of dielectrics
Author :
Courvoisier, F. ; Bhuyan, M.K. ; Jacquot, M. ; Lacourt, P.A. ; Furfaro, L. ; Withford, M.J. ; Dudley, J.M.
Author_Institution :
Dept. of Opt. P.M. Duffieux, Univ. de Franche-Comte, Besançon, France
Abstract :
Femtosecond Bessel beams are demonstrated for high aspect ratio machining in the filamentation regime with water assistance. Taper-free microchannels and micro-trenches are demonstrated with aspect ratio up to 40 and diameters down to 2 µm.
Keywords :
Dielectrics; Focusing; Glass; Laser beams; Machining; Materials processing; Microchannel; Micromachining; Nonlinear optics; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location :
San Jose, CA, USA
Print_ISBN :
978-1-55752-890-2
Electronic_ISBN :
978-1-55752-890-2
