• DocumentCode
    520466
  • Title

    Single-defect photonic crystal cavity laser fabricated by a combined lithography of laser holography and focused ion beam

  • Author

    Ahn, Sungmo ; Kim, Sihan ; Jeon, Heonsu

  • Author_Institution
    Dept. of Phys. & Astron., Seoul Nat. Univ., Seoul, South Korea
  • fYear
    2010
  • fDate
    16-21 May 2010
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    InP-based square-lattice photonic crystal laser with a single air-hole defect was fabricated by a combined lithography of laser holography and focused ion beam, which enables the large scale and high throughput fabrication of PC-based devices.
  • Keywords
    Chromium; Holographic optical components; Holography; Indium phosphide; Ion beams; Laser excitation; Laser theory; Lithography; Photonic crystals; Semiconductor lasers;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
  • Conference_Location
    San Jose, CA, USA
  • Print_ISBN
    978-1-55752-890-2
  • Electronic_ISBN
    978-1-55752-890-2
  • Type

    conf

  • Filename
    5500047