DocumentCode
520466
Title
Single-defect photonic crystal cavity laser fabricated by a combined lithography of laser holography and focused ion beam
Author
Ahn, Sungmo ; Kim, Sihan ; Jeon, Heonsu
Author_Institution
Dept. of Phys. & Astron., Seoul Nat. Univ., Seoul, South Korea
fYear
2010
fDate
16-21 May 2010
Firstpage
1
Lastpage
2
Abstract
InP-based square-lattice photonic crystal laser with a single air-hole defect was fabricated by a combined lithography of laser holography and focused ion beam, which enables the large scale and high throughput fabrication of PC-based devices.
Keywords
Chromium; Holographic optical components; Holography; Indium phosphide; Ion beams; Laser excitation; Laser theory; Lithography; Photonic crystals; Semiconductor lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location
San Jose, CA, USA
Print_ISBN
978-1-55752-890-2
Electronic_ISBN
978-1-55752-890-2
Type
conf
Filename
5500047
Link To Document