Title :
Light extraction enhancement of a light-emitting diode by fabricating surface gratings around the mesa with patterned photoelectrochemical wet etching
Author :
Lin, Cheng-Hung ; Chen, Cheng-Yen ; Yeh, Dong-Ming ; Yang, C.C.
Author_Institution :
Inst. of Photonics & Optoelectron., Nat. Taiwan Univ., Taipei, Taiwan
Abstract :
The >43% enhancement of light extraction by fabricating a surface grating structure around the mesa of a light-emitting diode with an approach combining photoelectrochemical wet etching and phase mask interferometry is demonstrated.
Keywords :
Diffraction gratings; Gallium nitride; Gold; Holography; Light emitting diodes; Optical interferometry; Rough surfaces; Scanning electron microscopy; Surface roughness; Wet etching;
Conference_Titel :
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location :
San Jose, CA, USA
Print_ISBN :
978-1-55752-890-2
Electronic_ISBN :
978-1-55752-890-2
