Title :
100 nm metallic checkerboard by wafer-scale nanoimprint and its application in surface enhanced Raman spectroscopy
Author :
Li, Wen-Di ; Wang, Chao ; Chou, Stephen Y.
Author_Institution :
Dept. of Electr. Eng., Princeton Univ., Princeton, NJ, USA
Abstract :
A wafer-scale (∼4 inch) 100 nm nano-checkerboard structure was fabricated. The fabrication combines multiple nanoimprint lithography, 3-D patterning and self-aligned etching. Transmission/reflection resonance at ∼750 nm and Raman enhancement of ∼ 4.5×106 were achieved.
Keywords :
Raman scattering; Spectroscopy;
Conference_Titel :
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location :
San Jose, CA, USA
Print_ISBN :
978-1-55752-890-2
Electronic_ISBN :
978-1-55752-890-2
