• DocumentCode
    52113
  • Title

    IEEE Transactions on Semiconductor Manufacturing information for authors

  • Volume
    28
  • Issue
    2
  • fYear
    2015
  • fDate
    May-15
  • Abstract
    These instructions give guidelines for preparing papers for this publication. Presents information for authors publishing in this journal.
  • fLanguage
    English
  • Journal_Title
    Semiconductor Manufacturing, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/TSM.2015.2425633
  • Filename
    7100985
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=52113