Title :
Laser-assisted chemical vapor deposition of silicon nano-layers in air-hole microstructure fibers
Author :
Xu, Di ; Chen, Tong ; Chen, Kevin ; Wang, Hao ; Lu, Yongfeng ; Lin, Yuankun
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Pittsburgh, Pittsburgh, PA, USA
Abstract :
This paper presents a laser-assisted chemical vapor deposition of silicon thin film and silicon thin film long-period gratings inside a two-hole fiber and photonic crystal fiber with hollow cores.
Keywords :
Chemical lasers; Chemical vapor deposition; Fiber lasers; Microstructure; Optical fiber devices; Optical films; Scanning electron microscopy; Semiconductor films; Semiconductor thin films; Silicon;
Conference_Titel :
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location :
San Jose, CA, USA
Print_ISBN :
978-1-55752-890-2
Electronic_ISBN :
978-1-55752-890-2
