Title :
Integrated MEMS tunable high quality factor optical cavity for optomechanical transduction
Author :
Miao, Houxun ; Srinivasan, Kartik ; Aksyuk, Vladimir
Author_Institution :
Center for Nanoscale Sci. & Technol., Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
Abstract :
We demonstrate a fully integrated optomechanical transducer achieving 580 ppm wavelength tuning of a high quality factor (Q=105–106) waveguide-coupled silicon microdisk by electrostatically actuating a dielectric membrane located in the evanescent field region above it.
Keywords :
Biomembranes; Dielectrics; Integrated optics; Micromechanical devices; Optical surface waves; Optical tuning; Optical waveguides; Q factor; Silicon; Transducers;
Conference_Titel :
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location :
San Jose, CA, USA
Print_ISBN :
978-1-55752-890-2
Electronic_ISBN :
978-1-55752-890-2
