Title :
Characterization of Bragg gratings in Al2O3 waveguides fabricated by focused ion beam milling and laser interference lithography
Author :
Ay, F. ; Bernhardi, E.H. ; Agazzi, L. ; Bradley, J.D.B. ; Wörhoff, K. ; Pollnau, M. ; de Ridder, R.M.
Author_Institution :
Integrated Opt. Microsyst. Group, Univ. of Twente, Enschede, Netherlands
Abstract :
Optical grating cavities in Al2O3 channel waveguides were successfully defined by focused ion beam milling and laser interference lithography. Both methods are shown to be suitable for realizing resonant structures for on-chip waveguide lasers.
Keywords :
Bragg gratings; aluminium compounds; fibre lasers; focused ion beam technology; optical fabrication; optical waveguides; Al2O3; Bragg gratings; channel waveguides; focused ion beam milling; laser interference lithography; on-chip waveguide lasers; optical grating cavities; Aluminum oxide; Bragg gratings; Etching; Interference; Lithography; Milling; Optical resonators; Optical waveguides; Particle beam optics; Waveguide lasers;
Conference_Titel :
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-890-2
Electronic_ISBN :
978-1-55752-890-2
