Title :
Oxidized Silicon-On-Insulator (OxSOI) from bulk silicon: a new photonic platform
Author :
Sherwood-Droz, Nicolás ; Gondarenko, Alexander ; Lipson, Michal
Author_Institution :
Sch. of Electr. & Comput. Eng., Cornell Univ., Ithaca, NY, USA
Abstract :
We demonstrate a bulk silicon alternative to SOI, using Si3N4 masking and oxidation techniques. We show waveguide losses of 2.92 dB/cm with a process compatible with the front-end of a typical CMOS fabrication line.
Keywords :
CMOS process; Etching; Optical buffering; Optical device fabrication; Optical interconnections; Optical waveguides; Oxidation; Protection; Silicon on insulator technology; Waveguide components;
Conference_Titel :
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location :
San Jose, CA, USA
Print_ISBN :
978-1-55752-890-2
Electronic_ISBN :
978-1-55752-890-2
