Title :
Silicon microring modulator with integrated heater and temperature sensor for thermal control
Author :
DeRose, Christopher T. ; Watts, Michael R. ; Trotter, Douglas C. ; Luck, David L. ; Nielson, Gregory N. ; Young, Ralph W.
Author_Institution :
Sandia Nat. Labs., Albuquerque, NM, USA
Abstract :
The first demonstration of a silicon microring modulator with both an integrated resistive heater and diode-based temperature sensor is shown. The temperature-sensor exhibits a linear response for more than an 85 °C external temperature range.
Keywords :
Contacts; Diodes; Optical modulation; Optical resonators; Resistance heating; Resonance; Resonant frequency; Silicon; Temperature control; Temperature sensors;
Conference_Titel :
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location :
San Jose, CA, USA
Print_ISBN :
978-1-55752-890-2
Electronic_ISBN :
978-1-55752-890-2