Title :
High resolution 3-D laser direct-write patterning
Author :
Li, Linjie ; Gattass, Rafael R. ; Stocker, Michael ; Gershgoren, Erez ; Hwang, Hana ; Fourkas, John T.
Author_Institution :
Dept. of Chem. & Biochem., Univ. of Maryland, College Park, MD, USA
Abstract :
Resolution Augmentation through Photo-Induced Deactivation (RAPID) lithography makes possible the creation of features that far smaller than the wavelength of light employed. We will present some of the latest advances in RAPID lithography.
Keywords :
Absorption; Biomedical optical imaging; Chemical lasers; Educational institutions; Laser beams; Lithography; Microscopy; Optical polymers; Resists; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location :
San Jose, CA, USA
Print_ISBN :
978-1-55752-890-2
Electronic_ISBN :
978-1-55752-890-2
