DocumentCode
521370
Title
High resolution 3-D laser direct-write patterning
Author
Li, Linjie ; Gattass, Rafael R. ; Stocker, Michael ; Gershgoren, Erez ; Hwang, Hana ; Fourkas, John T.
Author_Institution
Dept. of Chem. & Biochem., Univ. of Maryland, College Park, MD, USA
fYear
2010
fDate
16-21 May 2010
Firstpage
1
Lastpage
2
Abstract
Resolution Augmentation through Photo-Induced Deactivation (RAPID) lithography makes possible the creation of features that far smaller than the wavelength of light employed. We will present some of the latest advances in RAPID lithography.
Keywords
Absorption; Biomedical optical imaging; Chemical lasers; Educational institutions; Laser beams; Lithography; Microscopy; Optical polymers; Resists; Ultrafast optics;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location
San Jose, CA, USA
Print_ISBN
978-1-55752-890-2
Electronic_ISBN
978-1-55752-890-2
Type
conf
Filename
5500987
Link To Document