Title :
In situ monitoring of two-photon polymerization using broadband CARS microscopy
Author :
Baldacchini, Tommaso ; Zadoyan, Ruben
Author_Institution :
Technol. & Applic. Center, Newport Corp., Irvine, CA, USA
Abstract :
We present a method for monitoring in situ TPP using broadband CARS microscopy. Since both fabrication and imaging are performed using the same experimental setup, characterization of polymeric microstructures with structural information is attained rapidly.
Keywords :
Band pass filters; Laser beams; Laser excitation; Microscopy; Microstructure; Monitoring; Optical imaging; Polymers; Pump lasers; Resists;
Conference_Titel :
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location :
San Jose, CA, USA
Print_ISBN :
978-1-55752-890-2
Electronic_ISBN :
978-1-55752-890-2