Title :
Patterning of metal electrode on flexible substrate using laser transfer method
Author :
Chen, Kun-Tso ; Lin, Yu-Hsuan ; Ho, Jeng-Rong ; Liu, Sung-Ho ; Liao, Jin-Long ; Yan, Jing-Yi
Author_Institution :
Dept. of Mech. Eng., Nat. Chung Cheng Univ., Chiayi, Taiwan
Abstract :
Through incorporating with the technique of rapid polydimethysiloxane (PDMS) lift-off, this study reports on a new laser transfer method that is applicable to printing metallic thin film on a flexible substrate. Aluminum line patterns, with line widths of 40 and 100 µm and deposited on poly(ethylene terephthalate) (PET) substrate, are presented. The patterned film is demonstrated to be a good conductor, with resistivity of 2.95×10−6 Ω-cm, and with very good adhesion strength through the scotch-tape test.
Keywords :
Adhesives; Aluminum; Conductive films; Conductivity; Electrodes; Positron emission tomography; Printing; Substrates; Testing; Transistors;
Conference_Titel :
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location :
San Jose, CA, USA
Print_ISBN :
978-1-55752-890-2
Electronic_ISBN :
978-1-55752-890-2