Title :
Micro- and nano- scale system manufacturing using ultrafast lasers
Author_Institution :
Mech. Eng. Dept., Eindhoven Univ. of Technol., Eindhoven, Netherlands
Abstract :
Microsystems perform sophisticated tasks in miniaturized volumes. Shaping or analyzing light signals, mixing ultra-small volumes of chemicals, sensing mechanical signals, manipulating micro-objects, sequencing bio-molecules are common operations that can be done by these tiny machines. To further advance the field, there is a growing interest for integrated manufacturing platform where optics, fluid handling capabilities or micro-mechanical elements can be combined.
Keywords :
laser materials processing; micromechanical devices; optical fabrication; bio-molecules sequencing; chemicals mixing; light signals analyzing; light signals shaping; mechanical signals sensing; micro-objects manipulation; micro-scale system manufacturing; microsystems; nano-scale system manufacturing; ultrafast lasers; Biochemical analysis; Biomedical optical imaging; Chemical analysis; Chemical lasers; Integrated optics; Manufacturing; Optical mixing; Optical sensors; Signal analysis; Ultrafast optics;
Conference_Titel :
Lasers and Electro-Optics (CLEO) and Quantum Electronics and Laser Science Conference (QELS), 2010 Conference on
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-55752-890-2
Electronic_ISBN :
978-1-55752-890-2