Research on Electrostatic Micropump Pull-in Phenomena Based on Reduced Order Model

To investigate the pull-in phenomenon of electro-static micropump, the mechanical behavior of an electrostatic micropump employing a circular membrane is studied using a reduced order model (ROM) of membrane, which is constructed based on numerical calculation and mode superposition method. Comparing the results of ROM with the results calculated by 3D finite element model, it shows the ROM sped up computational cost without sacrificing the accuracy. In addition, the effects of different parameters such as initial gap, thickness, radius, residual stress on pull-in voltage and pull-in position are studied by the ROM, the obtained results provide an effective theoretical basis for the electrostatic micropump design and manufacture.