DocumentCode :
52544
Title :
Improved Capacitive Pressure Sensors Based on Liquid Alloy and Silicone Elastomer
Author :
Jungkeun Choi ; Seokbeom Kim ; Jungchul Lee ; Bumkyoo Choi
Author_Institution :
Dept. of Mech. Eng., Sogang Univ., Seoul, South Korea
Volume :
15
Issue :
8
fYear :
2015
fDate :
Aug. 2015
Firstpage :
4180
Lastpage :
4181
Abstract :
This letter reports sensitivity-improved capacitive pressure sensors fabricated using liquid alloy and highly compliant silicon elastomer. Multilayer elastomer layers prepared by replica moulding were stacked and bonded to form three isolated disk-shaped cavities whose diameters are 3 or 5 mm. Top and bottom cavities (both are 200-μm tall) were filled with eutectic gallium-indium to realize compliant parallel electrodes. The cavity in the middle (1-mm tall) was left empty to make it compressed with applied pressure. The overall diameter and height of fabricated pressure sensors are 6 or 7.5 mm and 4 or 6 mm, respectively. After fabricated liquid alloy capacitive pressure sensors were connected with external inductors to construct LC resonant circuits, their resonance frequencies were characterized with applied pressures ranging from 0 to 10 kPa. We found that liquid-alloy capacitive pressure sensors exhibit improved sensitivities over identically sized sensors with solid electrodes.
Keywords :
LC circuits; bonding processes; capacitance measurement; capacitive sensors; elastomers; electrochemical electrodes; eutectic alloys; gallium alloys; indium alloys; inductors; liquid alloys; moulding; pressure measurement; pressure sensors; replica techniques; resonators; silicones; soft lithography; GaIn; LC resonant circuit; bonding; capacitive pressure sensor; eutectic gallium-indium; inductors; isolated disk-shaped cavity; liquid alloy; multilayer elastomer layer; parallel electrode; pressure 0 kPa to 10 kPa; replica moulding; silicone elastomer; size 1 mm; size 200 mum; size 3 mm; size 4 mm; size 5 mm; size 6 mm; size 7.5 mm; Capacitive sensors; Cavity resonators; Electrodes; Metals; Sensor phenomena and characterization; Solids; Capacitive pressure sensor; Eutectic gallium-indium (EGaIn); Liquid alloy; Silicone elastomer; eutectic gallium-indium (EGaIn); liquid alloy; silicone elastomer;
fLanguage :
English
Journal_Title :
Sensors Journal, IEEE
Publisher :
ieee
ISSN :
1530-437X
Type :
jour
DOI :
10.1109/JSEN.2015.2426718
Filename :
7101223
Link To Document :
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