DocumentCode
527967
Title
Properties of Source-Gated Transistors in polysilicon
Author
Sporea, R.A. ; Shannon, J.M. ; Silva, S.R.P.
Author_Institution
Adv. Technol. Inst., Univ. of Surrey, Guildford, UK
fYear
2010
fDate
18-21 July 2010
Firstpage
1
Lastpage
4
Abstract
This paper describes some of the performance characteristics of self-aligned polysilicon Schottky Source-Gated Transistors (SGTs) made on glass by laser annealing of amorphous silicon. The threshold and Schottky barrier height are tuned by varying the dose of dopants in the bulk and under the source respectively. These devices are well suited for analog applications owing to their low saturation voltage, low drain field dependence of the current and intrinsic gain which is in excess of 1000 for well designed structures. Double drain operation leads to fT≈100MHz for non-optimized devices.
Keywords
Schottky barriers; amorphous semiconductors; elemental semiconductors; laser beam annealing; silicon; transistors; SGT; Schottky barrier height; Schottky source-gated transistors; Si; amorphous silicon; glass; laser annealing; self-aligned polysilicon; Current measurement; Doping; FETs; Implants; Logic gates; Schottky barriers; Schottky barrier; Source-Gated Transistor; analog circuits; polysilicon;
fLanguage
English
Publisher
ieee
Conference_Titel
Ph.D. Research in Microelectronics and Electronics (PRIME), 2010 Conference on
Conference_Location
Berlin
Print_ISBN
978-1-4244-7905-4
Type
conf
Filename
5587172
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