• DocumentCode
    527967
  • Title

    Properties of Source-Gated Transistors in polysilicon

  • Author

    Sporea, R.A. ; Shannon, J.M. ; Silva, S.R.P.

  • Author_Institution
    Adv. Technol. Inst., Univ. of Surrey, Guildford, UK
  • fYear
    2010
  • fDate
    18-21 July 2010
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    This paper describes some of the performance characteristics of self-aligned polysilicon Schottky Source-Gated Transistors (SGTs) made on glass by laser annealing of amorphous silicon. The threshold and Schottky barrier height are tuned by varying the dose of dopants in the bulk and under the source respectively. These devices are well suited for analog applications owing to their low saturation voltage, low drain field dependence of the current and intrinsic gain which is in excess of 1000 for well designed structures. Double drain operation leads to fT≈100MHz for non-optimized devices.
  • Keywords
    Schottky barriers; amorphous semiconductors; elemental semiconductors; laser beam annealing; silicon; transistors; SGT; Schottky barrier height; Schottky source-gated transistors; Si; amorphous silicon; glass; laser annealing; self-aligned polysilicon; Current measurement; Doping; FETs; Implants; Logic gates; Schottky barriers; Schottky barrier; Source-Gated Transistor; analog circuits; polysilicon;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ph.D. Research in Microelectronics and Electronics (PRIME), 2010 Conference on
  • Conference_Location
    Berlin
  • Print_ISBN
    978-1-4244-7905-4
  • Type

    conf

  • Filename
    5587172