Title :
Multi-user-multi-chip integrated MEMS for micro optics
Author_Institution :
Res. Center for Adv. Sci. & Technol. (RCAST), Univ. of Tokyo, Tokyo, Japan
Abstract :
This paper presents a new multi-user-multi-chip framework for integrated MEMS in the CMOS-first and MEMS-last style that could be useful to develop highly functional opto-mechanical devices such as WSS mirror array with high-voltage level shifters.
Keywords :
micro-optomechanical devices; mirrors; MEMS; WSS mirror array; high-voltage level shifters; micro-optics; multi-user-multi-chip framework; opto-mechanical devices; Arrays; CMOS integrated circuits; Large scale integration; Micromechanical devices; Mirrors; Optical switches;
Conference_Titel :
OptoElectronics and Communications Conference (OECC), 2010 15th
Conference_Location :
Sapporo
Print_ISBN :
978-1-4244-6785-3
